Flaga polski

Polski

MOBI ALD

Mobile ALD system for in-vacuo surface science measurements

The MOBIALD project aims to develop a mobile Atomic Layer Deposition (ALD) system designed for advanced surface and interface engineering. The system will enable direct integration of ALD processes with state-of-the-art surface science instruments operating under high and ultra-high vacuum (HV/UHV) conditions, allowing in-situ plasma-assisted surface modification and in-vacuo sample transfer.

project objectives

The main objectives are twofold: to design and construct a mobile ALD demonstrator and to validate its performance through surface science studies. These investigations will include X-ray absorption spectroscopy (XAS), comprising fluorescence and total electron yield measurements, as well as X-ray photoelectron spectroscopy (XPS). Experiments will be conducted in Poland at the SOLARIS synchrotron (XAS) and the AGH University of Krakow (XPS) by researchers from AGH.

The scientific goals focus on understanding the nucleation and early-stage growth of Al₂O₃, ZnO, and Cu-oxide films on metallic and hydroxylated surfaces, specifically the extent of adsorption and chemisorption of ALD gas precursors during each half-cycle. The obtained data will provide insights into the oxidation state, chemical and electronic state of the atoms, and elemental composition of the interfaces and growing layers.

SWISS-POLAND PROGRAM

The Swiss-Poland Programme (Swiss Cooperation Programme) is an initiative of the Swiss government aimed at reducing social and economic disparities within the European Union, including Poland. An additional benefit of the programme is the strengthening of bilateral cooperation between Switzerland and Poland.

Przejdź do strony programu:

programszwajcarski.gov.pl

PROJECT IMPLEMENTATION PERIOD AND FINANCING

Implementation period: April 1, 2025 – March 31, 2027

Project value: PLN 4 646 320,32

European Funds contribution: PLN 4 478 140,32

CONSORTIUM MEMBERS

CBRTP

PCO- Consortium leader, automation

Contact us

Office CBRTP:

ul. Zygmunta Modzelewskiego 77
02-679 Warszawa

Administration Department:
e-mail: office@cbrtp.pl

phone: +48 726 510 110

Measline sp. z o.o.

PCP, construction of a prototype

Contact us

MeasLine Skawina Branch:

ul. Pilsudskiego 3,
32-050 Skawina
e-mail: info@measline.com

phone: +48 12 307 29 80

AGH

PCP, sample characterization

Contact us

AGH University of Science and Technology in Kraków
Academic Centre for Materials and Nanotechnology

al. Mickiewicza 30
30-059 Krakow

Secretariat:

e-mail: acmin@agh.edu.pl

phone: +48 12 617 49 44

EMPA

PCP, process concept, simulations

Contact us

Ueberlandstrasse 129
8600 Dübendorf / Switzerland

phone: +41 58 765 11 11

PROJECT IMPLEMENTATION

Kick-off meeting of the consortium

On September 3–4, 2025, a meeting of representatives of the project partner institutions was held. The first day of the meeting was organized at the premises of the AGH University of Science and Technology in Kraków, while the second day took place at the headquarters of MeasLine sp. z o.o.

The purpose of the meeting was to formally initiate cooperation within the project and to facilitate mutual familiarization among the project partners. The participants met the teams responsible for project implementation and were introduced to the profiles and activities of the respective institutions. During the meeting, the scope of responsibilities of the individual partners was discussed, and the framework and schedule for further project cooperation were established.

Representatives of partner units during a meeting at the MeasLine headquarters

Completion of the MobiALD System Design Phase

As part of the MobiALD project, a mobile ALD system was designed.

The work included preparing the system concept, developing a 3D chamber model, and performing analyses and simulations to select appropriate dimensions, operating parameters, and key system components. Particular attention was paid to issues related to:

selection of the pumping system,
ensuring appropriate process gas flow conditions,
integration of the system with analytical instrumentation,
optimization of the chamber geometry,
ensuring uniform conditions for thin-film deposition with the ALD method.

Based on the analyses performed, design documentation was prepared, enabling the commencement of the subsequent stages of system implementation.

The website administrator is MeasLine sp. z o.o.

Contact details

ul. Pilsudskiego 3,
32-050 Skawina
phone.: +48 12 307 29 80
e-mail: info@measline.com